FORMATION OF METAL-RICH SILICIDES IN THE INITIAL-STAGE OF INTERFACIAL REACTIONS IN NB/SI SYSTEMS

被引：25

作者：

NAKANISHI, T ^{[1
]}

TAKEYAMA, M ^{[1
]}

NOYA, A ^{[1
]}

SASAKI, K ^{[1
]}

机构：

[1] KITAMI INST TECHNOL,FAC ENGN,DEPT MAT SCI,KITAMI,HOKKAIDO 090,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1995年 / 77卷 / 02期

关键词：

D O I：

10.1063/1.359584

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The interfacial reaction of Nb thin films on (100) Si indicates the first phase nucleation of metal-rich silicide and the occurrence of multiphases under certain annealing conditions. Nb3Si was identified as being the first nucleated phase at the annealing temperature of 550°C, and subsequently Nb5Si3 is found to be formed by annealing at 600°C. The multiphases of Nb3Si, Nb5Si3, and NbSi 2 were observed to be formed simultaneously in the specimen annealed at 650°C. The growth of NbSi2 by the out-diffusion of Si, which overcame the metal-rich phase, was observed at annealing temperatures over 700°C. © 1995 American Institute of Physics.

引用

页码：948 / 950

页数：3

共 37 条

[31] EVOLUTION IN HIGHLY DISPERSED PARTICLE ENSEMBLES ON THE SURFACE OF SOLIDS - MECHANISM OF THE INITIAL-STAGE IN FORMATION OF THIN MULTICOMPONENT FILMS .1. CONSERVATIVE-SYSTEMS
KUKUSHKIN, SA
FIZIKA TVERDOGO TELA, 1993, 35 (06): : 1582 - 1596
[32] STRUCTURE-ANALYSIS OF THE CAF2/SI(111) INTERFACE IN ITS INITIAL-STAGE OF FORMATION BY COAXIAL IMPACT-COLLISION ION-SCATTERING SPECTROSCOPY (CAICISS)
KATAYAMA, M
KING, BV
NOMURA, E
AONO, M
PROGRESS OF THEORETICAL PHYSICS SUPPLEMENT, 1991, (106): : 315 - 320
[33] Formation of Transition Metal-rich Glassy Phases in the Systems Ni-Pd-As, Ni-Pt-As, Pt-P, and Pd-Pt-P.
El-Boragy, Mohamed
Ellner, Martin
Predel, Bruno
Zeitschrift fuer Metallkunde/Materials Research and Advanced Techniques, 1985, 76 (01): : 60 - 63
[34] ON THE FORMATION OF TRANSITION METAL-RICH GLASSY PHASES IN THE SYSTEMS NI-PD-AS, NI-PT-AS, PT-P AND PD-PT-P
ELBORAGY, M
ELLNER, M
PREDEL, B
ZEITSCHRIFT FUR METALLKUNDE, 1985, 76 (01): : 60 - 63
[35] Diffusion pattern in MSi2 and M5Si3 silicides in group VB (M = V, Nb, Ta) and VIB (M = Mo, W) refractory metal-silicon systems
Roy, Soumitra
Prasad, Soma
Divinski, Sergiy V.
Paul, Aloke
PHILOSOPHICAL MAGAZINE, 2014, 94 (14) : 1508 - 1528
[36] The study of the mechanism of the local order formation near the iron atoms during thermolysis of [Fe3O(OOCCH=CHCOOH)6]OH•3H2O as the initial stage of nanoparticle nucleation in metal-polymer systems
Pomogailo, AD
Vlasenko, VG
Shuvaev, AT
Rozenberg, AS
Dzhardimalieva, GI
COLLOID JOURNAL, 2002, 64 (04) : 472 - 477
[37] The Study of the Mechanism of the Local Order Formation near the Iron Atoms during Thermolysis of [Fe3O(OOCCH=CHCOOH)6]OH · 3H2O as the Initial Stage of Nanoparticle Nucleation in Metal–Polymer Systems1
A. D. Pomogailo
V. G. Vlasenko
A. T. Shuvaev
A. S. Rozenberg
G. I. Dzhardimalieva
Colloid Journal, 2002, 64 : 472 - 477

← 1 2 3 4 →