THE EFFECT OF HYDROGEN ON BORON-DIFFUSION IN SIO2

被引：14

|

作者：

SHACHAMDIAMAND, Y

OLDHAM, WG

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1986年 / 15卷 / 04期

关键词：

D O I：

10.1007/BF02659636

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：229 / 233

页数：5

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