THE EFFECT OF HYDROGEN ON BORON-DIFFUSION IN SIO2

被引：14
|
作者：
SHACHAMDIAMAND, Y
OLDHAM, WG
机构：
来源：
JOURNAL OF ELECTRONIC MATERIALS | 1986年 / 15卷 / 04期
关键词：
D O I：
10.1007/BF02659636
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：229 / 233
页数：5
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