SI MOSFET FABRICATION USING FOCUSED ION-BEAMS

被引：0
|
作者：
KUBENA, RL
LEE, JY
JULLENS, RA
BRAULT, RG
MIDDLETON, PL
STEVENS, EH
机构：
来源：
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1984年 / 471卷
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
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页码：32 / 37
页数：6
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