共 50 条
- [39] In-line measurement of epitaxial silicon-germanium thin films by spectroscopic ellipsometry [J]. PROCEEDINGS OF THE ELECTROCHEMICAL SOCIETY SYMPOSIUM ON DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS AND DEVICES, 1997, 97 (12): : 160 - 170
- [40] Boron activation in silicon thin films grown by PECVD under epitaxial and microcrystalline conditions [J]. APPLIED SURFACE SCIENCE ADVANCES, 2023, 18