THIN SILICON EPITAXIAL LAYERS ON PREANNEALED SILICON SUBSTRATES

被引：0
|
作者：
WEIDNER, G [1 ]
KIRSCHT, FG [1 ]
RICHTER, F [1 ]
SEIFERT, W [1 ]
WEIDNER, M [1 ]
GLUCK, B [1 ]
MAI, M [1 ]
KALMANNE, AV [1 ]
RAUSCH, H [1 ]
机构：
[1] INST TELECOMMUN,H-1062 BUDAPEST,HUNGARY
来源：
CRYSTAL RESEARCH AND TECHNOLOGY | 1987年 / 22卷 / 05期
关键词：
D O I：
10.1002/crat.2170220505
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：651 / 659
页数：9
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