Synthesis of vertically aligned carbon nanofibers using inductively coupled plasma-enhanced chemical vapor deposition

被引:0
|
作者
Rizwan Shoukat
Muhammad Imran Khan
机构
[1] University of Freiburg,Department of Microsystems Engineering – IMTEK
[2] University of Engineering and Technology (UET),Department of Electronics Engineering
[3] University of Science and Technology of China (USTC),Micro/
来源
Electrical Engineering | 2018年 / 100卷
关键词
Carbon nanofibers; RF plasma; Glow discharge; Catalyst; Nanotechnology;
D O I
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学科分类号
摘要
This journal paper reports a highly reliable and efficient method for the growth of vertically aligned carbon nanofibers. The inductively coupled plasma-enhanced chemical vapor deposition method utilizes a low substrate temperature (approx. 650 ∘\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$${^{\circ }}$$\end{document}C) for the growth purpose using toluene as carbon source. Carbon nanofibers are characterized using SEM (scanning electron microscopy), EDX (energy-dispersive X-ray) and Raman spectroscopy. Uniform carbon nanofibers are grown on different substrates. The results further show that the use of catalyst is not mandatory to grow the carbon nanofibers.
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页码:997 / 1002
页数:5
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