Effects of Sputtering Time on Structure and Mechanical Properties of (AlCrNbSiTiV)N Coatings Deposited by High-Power Impulse Magnetron Cosputtering

被引:0
|
作者
Xiuyan Li
Weimin Tang
Cihai Chen
Chunyao Xu
机构
[1] Minnan Normal University,College of Physics and Information Engineering
来源
JOM | 2020年 / 72卷
关键词
D O I
暂无
中图分类号
学科分类号
摘要
The effect of the sputtering time on the microstructure and mechanical properties of (AlCrNbSiTiV)N coatings deposited using high-power impulse magnetron sputtering (HiPIMS) and cosputtering with (AlCrNbSiTiV) equimolar and Ti targets has been studied. The surface morphology of the (AlCrNbSiTiV)N coatings was uniform and dense, with no peel-off or microcracks, and the films demonstrated complete attachment to the substrate. The (AlCrNbSiTiV)N films had a single face-centered cubic phase. An increase in the sputtering time resulted in the deposition of larger grains on the surface of the film. The greatest (N2) and lowest (Al) concentration varied slightly for the (AlCrNbSiTiV)N films. The elements in the (AlCrNbSiTiV)N film exhibited homogeneous distributions throughout the depth, as measured by secondary-ion mass spectroscopy. The experimental results also revealed that a cutting tool coated with the film using a sputtering time of 30 min exhibited the minimum flank wear (11.7 μm) and surface roughness (Ra = 1.018 μm). Cutting tools coated with (AlCrNbSiTiV)N film for turning Ti-6Al-4V alloys will achieve better cutting quality and have a longer tool life.
引用
收藏
页码:2164 / 2173
页数:9
相关论文
共 50 条
  • [1] Effects of Sputtering Time on Structure and Mechanical Properties of (AlCrNbSiTiV)N Coatings Deposited by High-Power Impulse Magnetron Cosputtering
    Li, Xiuyan
    Tang, Weimin
    Chen, Cihai
    Xu, Chunyao
    [J]. JOM, 2020, 72 (06) : 2164 - 2173
  • [2] Structure and tribological behavior of (AlCrNbSiTiV)N film deposited using direct current magnetron sputtering and high power impulse magnetron sputtering
    Chang, Chun-Hao
    Yang, Ching-Been
    Sung, Chia-Chi
    Hsu, Chun-Yao
    [J]. THIN SOLID FILMS, 2018, 668 : 63 - 68
  • [3] Structure and properties of ZrN coatings deposited by high power impulse magnetron sputtering technology
    Purandare, Y. P.
    Ehiasarian, A. P.
    Hoveepian, P. Eh.
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2011, 29 (01):
  • [4] Microstructure and Properties of the Cr–Si–N Coatings Deposited by Combining High-Power Impulse Magnetron Sputtering(HiPIMS) and Pulsed DC Magnetron Sputtering
    Tie-Gang Wang
    Yu Dong
    Belachew Abera Gebrekidan
    Yan-Mei Liu
    Qi-Xiang Fan
    Kwang Ho Kim
    [J]. Acta Metallurgica Sinica(English Letters), 2017, 30 (07) : 688 - 696
  • [5] Microstructure and Properties of the Cr–Si–N Coatings Deposited by Combining High-Power Impulse Magnetron Sputtering (HiPIMS) and Pulsed DC Magnetron Sputtering
    Tie-Gang Wang
    Yu Dong
    Belachew Abera Gebrekidan
    Yan-Mei Liu
    Qi-Xiang Fan
    Kwang Ho Kim
    [J]. Acta Metallurgica Sinica (English Letters), 2017, 30 : 688 - 696
  • [6] The Structural and Mechanical Properties of CrAlTiN-Si Nanostructured Coatings Deposited by the Means of High-Power Impulse Magnetron Sputtering
    Jimenez, Andres Felipe Ordonez
    Vanegas, Henry Samir
    Moreno, Carlos Mauricio
    Olaya, Jhon Jairo
    Pineda, Yaneth
    [J]. METALS, 2023, 13 (10)
  • [7] Mechanical and Thermal Properties of W-Ta-B Coatings Deposited by High-Power Impulse Magnetron Sputtering (HiPIMS)
    Psiuk, Rafal
    Moscicki, Tomasz
    Chrzanowska-Gizynska, Justyna
    Kurpaska, Lukasz
    Radziejewska, Joanna
    Denis, Piotr
    Garbiec, Dariusz
    Chmielewski, Marcin
    [J]. MATERIALS, 2023, 16 (02)
  • [8] Microstructure and Properties of the Cr-Si-N Coatings Deposited by Combining High-Power Impulse Magnetron Sputtering (HiPIMS) and Pulsed DC Magnetron Sputtering
    Wang, Tie-Gang
    Dong, Yu
    Gebrekidan, Belachew Abera
    Liu, Yan-Mei
    Fan, Qi-Xiang
    Kim, Kwang Ho
    [J]. ACTA METALLURGICA SINICA-ENGLISH LETTERS, 2017, 30 (07) : 688 - 696
  • [9] Oxidation Resistance of TiAlN Coatings Deposited by Dual High-Power Impulse Magnetron Sputtering
    A. S. Grenadyorov
    V. O. Oskirko
    A. N. Zakharov
    K. V. Oskomov
    V. A. Semenov
    A. A. Solovyev
    A. N. Shmakov
    [J]. Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2023, 17 : S128 - S135
  • [10] Oxidation Resistance of TiAlN Coatings Deposited by Dual High-Power Impulse Magnetron Sputtering
    Grenadyorov, A. S.
    Oskirko, V. O.
    Zakharov, A. N.
    Oskomov, K. V.
    Semenov, V. A.
    Solovyev, A. A.
    Shmakov, A. N.
    [J]. JOURNAL OF SURFACE INVESTIGATION, 2023, 17 (SUPPL 1): : S128 - S135