Effects of Sputtering Time on Structure and Mechanical Properties of (AlCrNbSiTiV)N Coatings Deposited by High-Power Impulse Magnetron Cosputtering

被引:0
|
作者
Xiuyan Li
Weimin Tang
Cihai Chen
Chunyao Xu
机构
[1] Minnan Normal University,College of Physics and Information Engineering
来源
JOM | 2020年 / 72卷
关键词
D O I
暂无
中图分类号
学科分类号
摘要
The effect of the sputtering time on the microstructure and mechanical properties of (AlCrNbSiTiV)N coatings deposited using high-power impulse magnetron sputtering (HiPIMS) and cosputtering with (AlCrNbSiTiV) equimolar and Ti targets has been studied. The surface morphology of the (AlCrNbSiTiV)N coatings was uniform and dense, with no peel-off or microcracks, and the films demonstrated complete attachment to the substrate. The (AlCrNbSiTiV)N films had a single face-centered cubic phase. An increase in the sputtering time resulted in the deposition of larger grains on the surface of the film. The greatest (N2) and lowest (Al) concentration varied slightly for the (AlCrNbSiTiV)N films. The elements in the (AlCrNbSiTiV)N film exhibited homogeneous distributions throughout the depth, as measured by secondary-ion mass spectroscopy. The experimental results also revealed that a cutting tool coated with the film using a sputtering time of 30 min exhibited the minimum flank wear (11.7 μm) and surface roughness (Ra = 1.018 μm). Cutting tools coated with (AlCrNbSiTiV)N film for turning Ti-6Al-4V alloys will achieve better cutting quality and have a longer tool life.
引用
收藏
页码:2164 / 2173
页数:9
相关论文
共 50 条
  • [41] Enhanced properties of tungsten films by high-power impulse magnetron sputtering
    Engwall, A. M.
    Shin, S. J.
    Bae, J.
    Wang, Y. M.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2019, 363 : 191 - 197
  • [42] Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering
    Zakharov, A. N.
    Solov'ev, A. A.
    Oskomov, K. V.
    Oskirko, V. O.
    Semenov, V. A.
    Syrtanov, M. S.
    Bordulev, Yu S.
    [J]. RUSSIAN PHYSICS JOURNAL, 2017, 60 (08) : 1336 - 1340
  • [43] Properties of Molybdenum Films Produced by High-Power Impulse Magnetron Sputtering
    A. N. Zakharov
    A. A. Solov’ev
    K. V. Oskomov
    V. O. Oskirko
    V. A. Semenov
    M. S. Syrtanov
    Yu. S. Bordulev
    [J]. Russian Physics Journal, 2017, 60 : 1336 - 1340
  • [44] Tribocorrosion behaviors of TiSiCN nanocomposite coatings deposited by high power impulse magnetron sputtering
    Wang, Haoqi
    Ou, Yixiang
    Zhang, Xu
    Liao, Bin
    Ou, Xuedong
    Luo, Jun
    Pang, Pan
    Chen, Lin
    Hua, Qingsong
    Bao, Manyu
    [J]. MATERIALS RESEARCH EXPRESS, 2020, 7 (07)
  • [45] ZrN coatings deposited by high power impulse magnetron sputtering and cathodic arc techniques
    Purandare, Yashodhan
    Ehiasarian, Arutiun
    Santana, Antonio
    Hovsepian, Papken
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2014, 32 (03):
  • [46] CrAlYN/CrN superlattice coatings deposited by the combined high power impulse magnetron sputtering/unbalanced magnetron sputtering technique
    Hovsepian, P. Eh.
    Reinhard, C.
    Ehiasarian, A. P.
    [J]. SURFACE & COATINGS TECHNOLOGY, 2006, 201 (07): : 4105 - 4110
  • [47] Effects of substrate bias on structure and mechanical properties of (AlCrNbSiTiV)N coatings
    Huang, Ping-Kang
    Yeh, Jien-Wei
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2009, 42 (11)
  • [48] Effect of ion bombardment on TiN films deposited high-power impulse magnetron sputtering
    [J]. Wang, A. (aywang@nimte.ac.cn), 1600, Science Press (34):
  • [49] Multicomponent TixNbCrAl nitride films deposited by dc and high-power impulse magnetron sputtering
    Shu, Rui
    Du, Hao
    Sadowski, Grzegorz
    Dorri, Megan M.
    Rosen, Johanna
    Sortica, Mauricio A.
    Primetzhofer, Daniel
    Lundin, Daniel
    le Febvrier, Arnaud
    Eklund, Per
    [J]. SURFACE & COATINGS TECHNOLOGY, 2021, 426
  • [50] Effects of Substrate Rotation Speed on Structure and Adhesion Properties of CrN/CrAlSiN Multilayer Coatings Prepared Using High-Power Impulse Magnetron Sputtering
    Tang, Jian-Fu
    Huang, Chun-Hong
    Lin, Ching-Yen
    Yang, Fu-Chi
    Chang, Chi-Lung
    [J]. COATINGS, 2020, 10 (08)