Oxidation Resistance of TiAlN Coatings Deposited by Dual High-Power Impulse Magnetron Sputtering

被引：0
|
作者：
A. S. Grenadyorov
V. O. Oskirko
A. N. Zakharov
K. V. Oskomov
V. A. Semenov
A. A. Solovyev
A. N. Shmakov
机构：
[1] Institute of High Current Electronics,
[2] Siberian Branch,undefined
[3] Russian Academy of Sciences,undefined
[4] Budker Institute of Nuclear Physics,undefined
[5] Siberian Branch,undefined
[6] Russian Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
TiAlN coatings; nitride; dual magnetron sputtering; high-power impulse magnetron sputtering; heat resistance; hardness; oxidation; rutile; X-ray diffraction; synchrotron radiation;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：S128 / S135
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