Molecular beam epitaxy of BaF2/CaF2 buffer layers on the Si(100) substrate for monolithic photoreceivers

被引:9
|
作者
Filimonova N.I. [1 ]
Ilyushin V.A. [1 ]
Velichko A.A. [1 ]
机构
[1] Novosibirsk State Technical University, pr. Karla Marksa 20, Novosibirsk
关键词
AFM; barium fluoride; buffer layer; calcium fluoride; molecular beam epitaxy; silicon; surface morphology;
D O I
10.3103/S8756699017030153
中图分类号
学科分类号
摘要
This paper describes the study of the surface morphology of BaF2 epitaxial films grown by means of molecular beam epitaxy in various growth regimes on a CaF2/Si(100) surface, which is performed by means of atomic force microscopy. The CaF2 layers were obtained on a Si(100) substrate in a low-temperature growth regime (Ts = 500 °C). The technological regimes of growth of BaF2 continuous films with a smooth surface on CaF2/Si(100), suitable as buffer layers for the subsequent growth of PbSnTe layers or other semiconductors, such as A4B6, and solid solutions based on them. © 2017, Allerton Press, Inc.
引用
收藏
页码:303 / 308
页数:5
相关论文
共 50 条
  • [1] Initial growth of CaF2 and BaF2/CaF2 on Si(110) during molecular beam epitaxy
    Liu, WK
    Fang, XM
    Yuan, WL
    Santos, MB
    Chatterjee, T
    McCann, PJ
    ORear, EA
    JOURNAL OF CRYSTAL GROWTH, 1996, 167 (1-2) : 111 - 121
  • [2] Origin of Degradation of the CaF2/BaF2 Buffer Layers on Si(111)
    Neizvestny, I. G.
    Ishchenko, D. V.
    Akhundov, I. O.
    Suprun, S. P.
    Tereshchenko, O. E.
    DOKLADY PHYSICS, 2020, 65 (01) : 15 - 17
  • [3] Origin of Degradation of the CaF2/BaF2 Buffer Layers on Si(111)
    I. G. Neizvestny
    D. V. Ishchenko
    I. O. Akhundov
    S. P. Suprun
    O. E. Tereshchenko
    Doklady Physics, 2020, 65 : 15 - 17
  • [4] Effect of an Electron Beam on CaF2 and BaF2 Epitaxial Layers on Si
    Suprun, S. P.
    Shcheglov, D. V.
    JETP LETTERS, 2008, 88 (06) : 365 - 369
  • [5] Effect of an electron beam on CaF2 and BaF2 epitaxial layers on Si
    S. P. Suprun
    D. V. Shcheglov
    JETP Letters, 2008, 88 : 365 - 369
  • [6] Molecular beam epitaxial growth of Eu-doped CaF2 and BaF2 on Si
    Fang, XM
    Chatterjee, T
    McCann, PJ
    Liu, WK
    Santos, MB
    Shan, W
    Song, JJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (03): : 2267 - 2270
  • [7] Molecular beam epitaxy of periodic BaF2/PbEuSe layers on Si(111)
    Fang, XM
    Wu, HZ
    Shi, Z
    McCann, PJ
    Dai, N
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (03): : 1297 - 1300
  • [9] MOLECULAR-BEAM EPITAXY OF SI ON A CAF2/SI (100) STRUCTURE
    SASAKI, M
    ONODA, H
    JOURNAL OF APPLIED PHYSICS, 1986, 59 (09) : 3104 - 3109
  • [10] A MICROSTRUCTURAL STUDY OF CRYSTALLINE DEFECTS IN PBSE/BAF2/CAF2 ON (111)SI GROWN BY MOLECULAR-BEAM EPITAXY
    MATHET, V
    GALTIER, P
    NGUYENVANDAU, F
    PADELETTI, G
    OLIVIER, J
    JOURNAL OF CRYSTAL GROWTH, 1993, 132 (1-2) : 241 - 249