Amorphous and hexagonal boron nitride growth using bromide chemistry

被引：0
|
作者：
M. Jacquemin
A. Remigy
B. Menacer
V. Mille
C. Barraud
C. Lazzaroni
机构：
[1] Université Sorbonne Paris Nord,Laboratoire des Sciences des Procédés et des Matériaux
[2] CNRS,Laboratoire des Matériaux et Phénomènes Quantiques
[3] Université Paris Cité,undefined
[4] CNRS,undefined
来源：
MRS Communications | 2024年 / 14卷
关键词：
2D materials; Amorphous; Epitaxy; Plasma-enhanced CVD (PECVD) (chemical reaction); Crystal growth;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：63 / 68
页数：5
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