Optical readout uncooled infrared imaging detector using knife-edge filter operation

被引：11
|
作者：
Zhang Q. [1 ]
Miao Z. [1 ]
Guo Z. [1 ]
Dong F. [1 ]
Xiong Z. [1 ]
Wu X. [1 ]
Chen D. [2 ]
Li C. [2 ]
Jiao B. [2 ]
机构：
[1] Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China
[2] Institute of Microelectronics, Chinese Academy of Science
来源：
Optoelectronics Letters | 2007年 / 3卷 / 2期
基金：
中国国家自然科学基金;
关键词：
TP206+.1;
D O I：
10.1007/s11801-007-7014-2
中图分类号：
学科分类号：
摘要：
An optical readout uncooled infrared (IR) imaging detector of bimaterial cantilever array using knife-edge filter operation (KEFO) is demonstrated. The angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10-5 degree. A deformation magnifying substrate-free micro-cantilever unit with multi-fold interval metallized legs is specially designed and modeled. A FPA with 160 × 160 pixels is fabricated and thermal images with noise equivalent temperature difference (NETD) of 400 mK are obtained by this imaging detector. © 2007 Tianjin University of Technology.
引用
收藏
页码：119 / 122
页数：3
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