Optical readout uncooled infrared imaging detector using knife-edge filter operation

被引：11

作者：

Zhang Q. ^{[1
]}

Miao Z. ^{[1
]}

Guo Z. ^{[1
]}

Dong F. ^{[1
]}

Xiong Z. ^{[1
]}

Wu X. ^{[1
]}

Chen D. ^{[2
]}

Li C. ^{[2
]}

Jiao B. ^{[2
]}

机构：

[1] Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China

[2] Institute of Microelectronics, Chinese Academy of Science

来源：

Optoelectronics Letters | 2007年 / 3卷 / 2期

基金：

中国国家自然科学基金;

关键词：

TP206+.1;

D O I：

10.1007/s11801-007-7014-2

中图分类号：

学科分类号：

摘要：

An optical readout uncooled infrared (IR) imaging detector of bimaterial cantilever array using knife-edge filter operation (KEFO) is demonstrated. The angle change of each cantilever in a focal plane array (FPA) can be simultaneously detected with a resolution of 10-5 degree. A deformation magnifying substrate-free micro-cantilever unit with multi-fold interval metallized legs is specially designed and modeled. A FPA with 160 × 160 pixels is fabricated and thermal images with noise equivalent temperature difference (NETD) of 400 mK are obtained by this imaging detector. © 2007 Tianjin University of Technology.

引用

页码：119 / 122

页数：3

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