Three-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect

被引：1
|
作者：
Busurin V.I. [1 ]
Fam A.T. [1 ]
Zheglov M.A. [2 ]
Medvedev V.M. [1 ,2 ]
机构：
[1] Moscow Aviation Institute, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow
[2] State Scientific Research Institute of Instrument Making, pr. Mira 125, Moscow
来源：
Optoelectronics, Instrumentation and Data Processing | 2017年 / 53卷 / 6期
基金：
俄罗斯基础研究基金会;
关键词：
angular velocity; dynamic range; minimum detectable value; noise; three-axis MOEM transducer; tunnel effect;
D O I：
10.3103/S8756699017060048
中图分类号：
学科分类号：
摘要：
A three-axis micro-opto-electro-mechanical (MOEM) angular velocity transducer model based on the optical tunneling effect was developed. The transfer function was determined, and the effect of destabilizing factors on the characteristics of the three-axis MOEM angular velocity transducer was evaluated. The dynamic range of the MOEM transducer based on the optical tunneling effect was calculated. © 2017, Allerton Press, Inc.
引用
收藏
页码：562 / 569
页数：7
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