Three-Axis Micro-Opto-Electro-Mechanical Angular Velocity Transducer Based on the Optical Tunneling Effect

被引：1
|
作者：
Busurin V.I. [1 ]
Fam A.T. [1 ]
Zheglov M.A. [2 ]
Medvedev V.M. [1 ,2 ]
机构：
[1] Moscow Aviation Institute, Volokolamskoe Shosse 4, A-80, GSP-3, Moscow
[2] State Scientific Research Institute of Instrument Making, pr. Mira 125, Moscow
来源：
Optoelectronics, Instrumentation and Data Processing | 2017年 / 53卷 / 6期
基金：
俄罗斯基础研究基金会;
关键词：
angular velocity; dynamic range; minimum detectable value; noise; three-axis MOEM transducer; tunnel effect;
D O I：
10.3103/S8756699017060048
中图分类号：
学科分类号：
摘要：
A three-axis micro-opto-electro-mechanical (MOEM) angular velocity transducer model based on the optical tunneling effect was developed. The transfer function was determined, and the effect of destabilizing factors on the characteristics of the three-axis MOEM angular velocity transducer was evaluated. The dynamic range of the MOEM transducer based on the optical tunneling effect was calculated. © 2017, Allerton Press, Inc.
引用
收藏
页码：562 / 569
页数：7
相关论文
共 35 条
  • [31] Investigation of microopto-eletromechanical angular velocity and acceleration transducers based on optical tunneling effect
    Busurin, V. I.
    Lwin, Naing Htoo
    Pham Anh Tuan
    4TH INTERNATIONAL CONFERENCE OF PHOTONICS AND INFORMATION OPTICS, PHIO 2015, 2015, 73 : 198 - 204
  • [32] Microoptoelectromechanical ring angular velocity transducer based on the optical tunnel effect for control system of mobile objects
    Busurin, V. I.
    Win, Yin Naing
    INTERNATIONAL CONFERENCE: INFORMATION TECHNOLOGIES IN BUSINESS AND INDUSTRY, 2019, 1333
  • [33] High-speed optical three-axis vector magnetometry based on nonlinear Hanle effect in rubidium vapor
    Azizbekyan, Hrayr
    Shmavonyan, Svetlana
    Khanbekyan, Aleksandr
    Movsisyan, Marina
    Papoyan, Aram
    OPTICAL ENGINEERING, 2017, 56 (07)
  • [34] Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings
    Chen, Wenqing
    Jin, Li
    Wang, Zhibin
    Peng, Haifeng
    Li, Mengwei
    MICROMACHINES, 2023, 14 (07)
  • [35] Three-dimensional thermo-electro-mechanical buckling analysis of functionally graded piezoelectric micro/nano-shells based on modified couple stress theory considering thickness stretching effect
    Lori Dehsaraji, Maryam
    Loghman, Abbas
    Arefi, Mohammad
    MECHANICS OF ADVANCED MATERIALS AND STRUCTURES, 2021, 28 (19) : 2030 - 2045
1234