Optical characterization methods of InP based micro-opto-electro-mechanical systems.

We have studied actuable suspended beams that form vertical optical resonant cavities. They are fabricated by sacrificial layers etching techniques on InP. They can be used as tunable optical filters for telecommunication applications. In this paper, we report optical characterizations of those devices. We have used micro reflectivity and optical profilometer measurements to make those characterizations. We have developed a micro-reflectivity experimental setup which uses the confocal principle. We have shown the deformation of the suspended beams and the variation of the reflectivity response induced by electrostatic actuation of the devices.