Single-crystal diamond probes for atomic-force microscopy

被引:0
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作者
P. G. Kopylov
B. A. Loginov
R. R. Ismagilov
A. N. Obraztsov
机构
[1] Moscow State University,Physics Department
[2] Moscow State Institute of Electronic Engineering,undefined
关键词
Atomic Force Microscopy; Atomic Force Microscopy Image; Pressure Force; Diamond Film; Granulometric Composition;
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学科分类号
摘要
The results of investigations aimed at the development and testing of diamond probes for scanning atomic-force microscopy are presented. Plasmochemical deposition of diamond polycrystalline films and selective thermal oxidation were used to manufacture diamond probes. The obtained single-crystal diamond pyramidal tips of micron size had a radius of curvature of 2–20 nm at the top. The diamond tips were attached to a cantilever with an epoxy adhesive and then tested as probes in scanning atomic-force microscopy. Tests have shown that the manufactured diamond probes have appreciable advantages over conventional probes.
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页码:613 / 619
页数:6
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