Modeling of through-mask electrochemical micromachining

被引：0
|
作者：
V. M. Volgin
T. B. Kabanova
A. D. Davydov
机构：
[1] Tula State University,Frumkin Institute of Physical Chemistry and Electrochemistry
[2] Russian Academy of Sciences,undefined
来源：
Journal of Applied Electrochemistry | 2015年 / 45卷
关键词：
Through-mask etching; Modeling; Current distribution; Undercutting; Laplace equation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A scheme of numerical modeling of through-mask electrochemical machining, which enables one to predict the shape and sizes of workpiece surface, is developed. The effect of mask parameters (a fraction of unprotected area, mask thickness and unprotected region width) on the distribution of an average current density over the workpiece surface is analyzed. The developed mathematic model and the calculated results can be used to design the operations of electrochemical micromachining with partial insulation of workpiece surface.
引用
收藏
页码：679 / 688
页数：9
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