Anisotropy of dissolution rate in through-mask electrochemical micromachining

被引：0
|
作者：
Dikusar, AI
Keloglu, OY
Mustiatze, AN
Yuschenkos, SP
机构：
来源：
12TH INTERNATIONAL SYMPOSIUM FOR ELECTROMACHINING (ISEM) | 1998年 / 1405卷
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D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：565 / 574
页数：10
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