Modeling of through-mask electrochemical micromachining

被引：11
|
作者：
Volgin, V. M. [1 ]
Kabanova, T. B. [2 ]
Davydov, A. D. [2 ]
机构：
[1] Tula State Univ, Tula 300012, Russia
[2] Russian Acad Sci, Frumkin Inst Phys Chem & Electrochem, Moscow 119071, Russia
来源：
JOURNAL OF APPLIED ELECTROCHEMISTRY | 2015年 / 45卷 / 07期
基金：
俄罗斯基础研究基金会;
关键词：
Through-mask etching; Modeling; Current distribution; Undercutting; Laplace equation; POROUS-TYPE ANODIZATION; LASER IRRADIATION; SHAPE EVOLUTION; WALL ANGLE; FABRICATION; ALUMINUM; TITANIUM; ARRAY; LITHOGRAPHY; TRANSPORT;
D O I：
10.1007/s10800-015-0843-y
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
A scheme of numerical modeling of through-mask electrochemical machining, which enables one to predict the shape and sizes of workpiece surface, is developed. The effect of mask parameters (a fraction of unprotected area, mask thickness and unprotected region width) on the distribution of an average current density over the workpiece surface is analyzed. The developed mathematic model and the calculated results can be used to design the operations of electrochemical micromachining with partial insulation of workpiece surface.
引用
收藏
页码：679 / 688
页数：10
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