Two-stage compliant microleverage mechanism optimization in a resonant accelerometer

被引：0
|
作者：
X.-P.S. Su
H.S. Yang
机构：
[1] Department of Mechanical Engineering,
[2] University of California,undefined
[3] Berkeley,undefined
[4] CA 94720,undefined
[5] USA e-mail: xpsu@newton.berkeley.edu,undefined
[6] Applied Materials,undefined
[7] 3320 Scott Boulevard,undefined
[8] M/S 1158,undefined
[9] Santa Clara,undefined
[10] CA 95054,undefined
[11] USA,undefined
来源：
Structural and Multidisciplinary Optimization | 2001年 / 22卷
关键词：
Key words: resonant accemherometer, leverage mechanism, force amplification, compliant mechanism;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Compliant microleverage mechanisms can be used in micro-electro-mechanical systems (MEMS) to transfer an input force/displacement to an output to achieve mechanical/geometrical advantages. By stacking multiple stages of microlevers together, a compound microleverage mechanism is obtained with a higher amplification factor. This paper presents the analysis and optimization of a two-stage microleverage mechanism in a resonant output micro-accelerometer for force amplification. It is found that the compliance of the two-stage mechanism needs to be appropriately distributed in order for both stages to have the desired amplification effect.
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页码：328 / 334
页数：6
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