Proton-induced failures in high-power field-effect transistors

被引:0
|
作者
N. A. Ivanov
E. V. Mitin
V. V. Pashuk
M. G. Tverskoy
机构
[1] Russian Academy of Sciences,Konstantinov Nuclear Physics Institute
[2] RNII Elektronstandart Company,undefined
来源
Technical Physics Letters | 2011年 / 37卷
关键词
Technical Physic Letter; Linear Energy Transfer; Gate Insulator; High Energy Proton; Oxide Film Thickness;
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摘要
The effect of 1000-MeV protons on high-power metal-oxide-semiconductor field-effect transistors (MOSFETs) manufactured using microelectronic technology has been studied. It is established that high-energy proton bombardment leads to breakdown of the gate insulator (oxide) in the MOSFET structure that results in a “catastrophic” failure of the device. A model explaining the appearance of these failures is proposed that is based on the formation of fast residual particles as a result of nuclear reactions between high-energy protons and nuclei of the semiconductor material.
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页码:58 / 61
页数:3
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