Electromagnetic levitation micromotor with stator embedded (ELMSE): levitation and lateral stability characteristics analysis

被引：0
|
作者：
Xiaosheng Wu
Teng Deng
Wenyuan Chen
Weiping Zhang
机构：
[1] Shanghai Jiao Tong University,Key Laboratory for Thin Film and Microfabrication Technology of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology
来源：
Microsystem Technologies | 2011年 / 17卷
关键词：
Electromagnetic Force; Levitate Force; Lateral Stiffness; Vertical Stiffness; Electromagnetic Levitation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The adhesion, friction, wear in micro system or MEMS is more significant than those in macro system. The levitation or suspension technique is one of the effective techniques to eliminate the adhesion, friction, wear caused by the surfaces contact. The electromagnetic levitation micromotor with stators embedded (ELMSE) is a kind electromagnetic eddy current levitation system, which has special structure including the double sided stator and the hollow annular rotor. Different from the electromagnetic eddy current levitation system with single sided stator, ELMSE has good stability in the vertical and lateral directions. Using the finite element method, the levitation characteristics and lateral stability characteristics are analyzed. The influence of structural parameters and electric parameters on the vertical stiffness and the lateral stiffness has been analyzed and optimized in the paper. The analysis result of the paper provides theoretical reference for the optimal design of ELMSE.
引用
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页码：59 / 69
页数：10
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