Mechanical stress measurements using micro-Raman spectroscopy

被引：0
|
作者：
I. De Wolf
H. E. Maes
机构：
[1] IMEC,
[2] Kapeldreef 75,undefined
[3] B-3001 Leuven,undefined
[4] Belgium,undefined
来源：
Microsystem Technologies | 1998年 / 5卷
关键词：
Spectroscopy; Silicon; Mechanical Stress; Stress Measurement; Solder Bump;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
 The application of micro-Raman spectroscopy for measurements of mechanical stress in silicon microelectronics devices is discussed. The advantages and disadvantages of the technique are shown through different examples such as Si3N4 and metal lines, isolation structures and solder bumps.
引用
收藏
页码：13 / 17
页数：4
相关论文
共 50 条
  • [31] Residual Stress in Porous Silicon Film with Micro-Raman Spectroscopy
    Qiu, Wei
    Li, Qiu
    Kang, Yilan
    Lei, Zhenkun
    FOURTH INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS, 2010, 7522
  • [32] The examination of the Book of Kells using micro-Raman spectroscopy
    Bioletti, Susan
    Leahy, Rory
    Fields, John
    Meehan, Bernard
    Blau, Werner
    JOURNAL OF RAMAN SPECTROSCOPY, 2009, 40 (08) : 1043 - 1049
  • [33] Depth profiling of strain using micro-Raman measurements
    Atkinson, A
    Jain, SC
    Maes, HE
    Pinardi, K
    Willander, M
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2001, 16 (07) : 584 - 588
  • [34] Micro-Raman study of mechanical stress in polycrystalline silicon bridges
    Talaat, H
    Negm, S
    Schaffer, H
    Kaltsas, G
    Nassiopoulou, AG
    THIN-FILMS - STRESSES AND MECHANICAL PROPERTIES VII, 1998, 505 : 495 - 500
  • [35] DRUG ANALYSIS BY RAMAN AND MICRO-RAMAN SPECTROSCOPY
    HUONG, PV
    JOURNAL OF PHARMACEUTICAL AND BIOMEDICAL ANALYSIS, 1986, 4 (06) : 811 - 823
  • [36] Experimental one- and two-dimensional mechanical stress characterization of silicon microsystems using micro-Raman spectroscopy
    van Spengen, WM
    De Wolf, I
    Knechtel, R
    MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING III, 2000, 4175 : 132 - 139
  • [37] Stress imaging in structural challenging MEMS with high sensitivity using micro-Raman spectroscopy
    Meszmer, Peter
    Rodriguez, Raul D.
    Sheremet, Evgeniya
    Zahn, Dietrich R. T.
    Wunderle, Bernhard
    MICROELECTRONICS RELIABILITY, 2017, 79 : 104 - 110
  • [38] Invited Article: Simultaneous mapping of temperature and stress in microdevices using micro-Raman spectroscopy
    Beechem, Thomas
    Graham, Samuel
    Kearney, Sean P.
    Phinney, Leslie M.
    Serrano, Justin R.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (06):
  • [39] Micro-Raman Spectroscopy on oral tissues
    Zenone, F.
    Lepore, M.
    Perna, G.
    Carmone, P.
    Riccio, R.
    Gaeta, G. M.
    Capozzi, V.
    LASERS IN DENTISTRY XII, 2006, 6137
  • [40] LINE FOCUSING IN MICRO-RAMAN SPECTROSCOPY
    IVANDA, M
    FURIC, K
    APPLIED OPTICS, 1992, 31 (30) : 6371 - 6375
12345