Application of Two-Wavelength X-Ray Optical Scheme for Combined Measurements of X-Ray Specular Reflection and Diffuse Scattering to Study Multilayered Thin Film Structures

被引：1
|
作者：
Smirnov D.I. [1 ,2 ]
Gerasimenko N.N. [1 ,2 ,3 ]
Ovchinnikov V.V. [4 ]
机构：
[1] National Research University of Electronic Technology MIET, Moscow
[2] Lebedev Physical Institute, Russian Academy of Sciences, Moscow
[3] Tomsk National Research State University, Tomsk
[4] Institute of Electrophysics, Ural Branch, Russian Academy of Sciences, Ekaterinburg
来源：
Russian Microelectronics | 2017年 / 46卷 / 07期
基金：
俄罗斯科学基金会;
关键词：
thin film nanostructures; two-wavelength X-ray optical scheme; X-ray diffuse scattering; X-ray reflectometry;
D O I：
10.1134/S1063739717070101
中图分类号：
学科分类号：
摘要：
The complex study results of the parameters of TiN/Ti diffusion-barrier structures using the methods of relative X-ray reflectometry and diffuse scattering of X-ray radiation implemented by a two-wavelength X-ray optical measurement scheme are presented. It is shown that this scheme, by a single measurement, enables studying two different diffuse scattering regions, which increases the correctness and unambiguity of the analysis that was carried out. The considered complex of methods makes it possible to solve the ambiguity of a density/roughness type by the solution of the inverse reflectometry problem and to calculate the parameters of buried layers in the structures which were studied. © 2017, Pleiades Publishing, Ltd.
引用
收藏
页码：523 / 526
页数：3
相关论文
共 50 条
  • [21] Effect of the interface structure in multilayered systems on x-ray specular scattering spectra
    V. P. Romanov
    S. V. Uzdin
    V. M. Uzdin
    S. V. Ul’yanov
    Physics of the Solid State, 2006, 48 : 155 - 163
  • [22] Effect of the interface structure in multilayered systems on X-ray specular scattering spectra
    Romanov, VP
    Uzdin, SV
    Uzdin, VM
    Ul'yanov, SV
    PHYSICS OF THE SOLID STATE, 2006, 48 (01) : 155 - 163
  • [23] Metrological applications of X-ray waveguide thin film structures in X-ray reflectometry and diffraction
    Pelka, JB
    Lagomarsino, S
    ACTA PHYSICA POLONICA A, 2002, 102 (02) : 233 - 238
  • [24] X-ray fluorescent spectrometer with total X-ray reflection for studies of kinetics of thin film deposition
    V. M. Raznomazov
    V. O. Ponomarenko
    N. M. Novikovskii
    Yu. I. Velichko
    A. P. Kovtun
    R. V. Vedrinskii
    D. A. Sarychev
    Inorganic Materials, 2011, 47 : 1569 - 1573
  • [25] X-ray Fluorescent Spectrometer with Total X-ray Reflection for Studies of Kinetics of Thin Film Deposition
    Raznomazov, V. M.
    Ponomarenko, V. O.
    Novikovskii, N. M.
    Velichko, Yu. I.
    Kovtun, A. P.
    Vedrinskii, R. V.
    Sarychev, D. A.
    INORGANIC MATERIALS, 2011, 47 (14) : 1569 - 1573
  • [26] Monte Carlo simulation of non-specular X-ray scattering profiles from multilayered structures
    Gladyszewski, G
    Bruynseraede, Y
    THIN SOLID FILMS, 1996, 275 (1-2) : 184 - 187
  • [27] Application of X-ray reflection interface microscopy to thin-film materials
    Zhang, Zhan
    Zschack, Paul
    Fenter, Paul
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2011, 649 (01): : 188 - 190
  • [28] X-ray diffuse scattering effects from Coulomb-type defects in multilayered structures
    Olikhovskii, S. I.
    Molodkin, V. B.
    Skakunova, E. S.
    Kislovskii, E. N.
    Fodchuk, I. M.
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2009, 206 (08): : 1790 - 1794
  • [29] X-RAY DIFFUSE SCATTERING STUDY OF STRUCTURE OF GLASS
    TOMOZAWA, M
    AMERICAN CERAMIC SOCIETY BULLETIN, 1971, 50 (09): : 767 - &
  • [30] Study of molecular conductors by X-ray diffuse scattering
    Ravy, S
    CHEMICAL REVIEWS, 2004, 104 (11) : 5609 - 5634
12345