Photoinduced trap generation at the Si-SiO2 interface

被引:0
|
作者
M. Cernusca
R. Heer
G.A. Reider
机构
[1] Technische Universität Wien,
[2] Abteilung Quantenelektronik und Lasertechnik,undefined
[3] Gusshausstr. 27/359-4,undefined
[4] A-1040 Vienna,undefined
[5] Austria (Fax: 43-1/504-2477,undefined
[6] E-mail: reider@ps1.iaee.tuwien.ac.at),undefined
来源
Applied Physics B | 1998年 / 66卷
关键词
PACS: 78.66.-w; 79.20.-m; 42.65.-k;
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摘要
interface upon irradiation of oxidized Si(100) and Si(111) samples with femtosecond laser pulses of nanojoule pulse energy at the wavelength of 780 nm (1.6 eV). We attribute this effect to a dc-field-induced SH contribution which results from the creation of new oxide traps by a photoinduced damage process. The damage process occurs, with a significantly lower efficiency, also under cw irradiation; the experimental results, however, rule out a thermal origin of the effect as well as a multiphoton effect.
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页码:367 / 370
页数:3
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