Size measurements in microelectronic technology

被引：0
|
作者：
A. V. Nikitin
机构：
[1] Institute of Arts and Information Technologies,
[2] Branch,undefined
来源：
Measurement Techniques | 2012年 / 55卷
关键词：
algorithms; nonlinearity; calibration of magnification; reproducibility and accuracy of results;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The status of and problems with size measurements in the technologies for fabrication of microelectronic devices with dimensions of hundreds or tens of nanometers are examined under industrial production conditions. It is argued that relative measurements are inadequate and it is necessary to proceed to measurements on an absolute size scale that will ensure absolute accuracy of the results, as well as their reproducibility, which are especially important for the development of nanometer-sized devices.
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页码：867 / 875
页数：8
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