A cryosystem for cooling samples in a secondary-ion mass spectrometer with a static analyzer

被引：0
|
作者：
A. N. Pustovit
A. M. Ionov
机构：
[1] Russian Academy of Sciences,Institute of Microelectronics Technology and High Purity Materials
[2] Russian Academy of Sciences,Institute of Solid State Physics
来源：
Instruments and Experimental Techniques | 2014年 / 57卷
关键词：
Cryogenic Temperature; Cooling Sample; Cryogenic System; GaAs Sample; Transport Line;
D O I：
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中图分类号：
学科分类号：
摘要：
A cryogenic system for cooling samples in an IMS-4F secondary-ion mass spectrometer with a static analyzer is described. The cryogenic system allows maintenance of the sample temperature with an accuracy of ±1 K in a temperature range of 60–420 K by combining heating and cooling (by using liquid helium or nitrogen). The effect of the sample temperature (300 and 110 K) on the secondary-ion mass spectra of Si and GaAs samples is considered.
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页码：91 / 94
页数：3
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