Transformation of a SiC/por-SiC/TiO2 structure during rapid thermal annealing

被引：0
|
作者：
R. V. Konakova
O. F. Kolomys
O. S. Lytvyn
O. B. Okhrimenko
V. V. Strelchuk
A. M. Svetlichnyi
L. G. Linets
机构：
[1] National Academy of Sciences of Ukraine,Lashkaryov Institute of Semiconductor Physics
[2] Southern Federal University,Taganrog Institute of Technology
来源：
Semiconductors | 2012年 / 46卷
关键词：
Raman Spectrum; Rapid Thermal Anneal; Titanium Oxide Film; Tita Nium Silicide; Rapid Thermal Anneal Temperature;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The surface morphology and the Raman and photoluminescence spectra of a SiC/por-SiC/TiO2 structure before and after rapid thermal annealing are studied. It is shown that rapid thermal annealing brings about the appearance of new bands in the Raman spectrum; these bands are characteristic of carbon compounds. An analysis of the spectra of photoluminescence excited by radiation with an energy lower than that of the band-gap energy in 6H-SiC has shown that the appearance of photoluminescence in porous silicon carbide is related to impurity states, which are formed at the surface due to products of chemical reactions in the course of etching.
引用
收藏
页码：1221 / 1224
页数：3
相关论文
共 50 条
  • [41] Influence of TiO2 on the Thermal Shcok Resistance of Al2O3-SiC-C Castables
    Yin Yucheng
    Liang Yonghe
    Ge Shan
    Lu Jiuchang
    Nie Jianhua
    Liu Zhiqiang
    RARE METAL MATERIALS AND ENGINEERING, 2013, 42 : 863 - 867
  • [42] Effects of rapid thermal annealing on the local environment, electronic structure and magnetic properties of Mn doped TiO2 thin films
    Aljawfi, Rezq Naji
    Vij, Ankush
    Chae, K. H.
    Dalela, S.
    Alvi, P. A.
    AL-Maghrabi, M. A.
    Kumar, Shalendra
    APPLIED SURFACE SCIENCE, 2018, 445 : 287 - 297
  • [43] Enhancement of thermal properties of Kevlar 29 coated by SiC and TiO2 nanoparticles and their binding energy analysis
    Islam, Md. Akibul
    Chowdhury, Mohammad Asaduzzaman
    Kowser, Md. Arefin
    Ali, Md. Osman
    Azad, Kameliya
    Ali, Md. Ramjan
    ARABIAN JOURNAL OF CHEMISTRY, 2022, 15 (08)
  • [44] Sliding wear of LM25 aluminium alloy with 7.5% SiC+2.5% TiO2 and 2.5% SiC+7.5% TiO2 hybrid composites
    Elango, G.
    Raghunath, B. K.
    Palanikumar, K.
    Thamizhmaran, K.
    JOURNAL OF COMPOSITE MATERIALS, 2014, 48 (18) : 2227 - 2236
  • [45] Band alignment of TiO2/SiC and TiO2/Si heterojunction interface grown by atomic layer deposition
    Zeng, Yu-Xuan
    Wang, Xi-Rui
    Zhang, Jie
    Huang, Wei
    Yang, Lei
    Ma, Hong-Ping
    Zhang, Qing-Chun
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2023, 38 (07)
  • [46] Heat Transfer in Water-Based SiC and TiO2 Nanofluids
    Celata, Gian Piero
    D'Annibale, Francesco
    Mariani, Andrea
    Saraceno, Luca
    D'Amato, Rosaria
    Bubbico, Roberto
    HEAT TRANSFER ENGINEERING, 2013, 34 (13) : 1060 - 1072
  • [47] Reaction sintering of SiC composites with in situ converted TiO2 to TiC
    Ahmoye, Daniel
    Krstic, Vladimir D.
    JOURNAL OF MATERIALS SCIENCE, 2015, 50 (07) : 2806 - 2812
  • [48] Reaction sintering of SiC composites with in situ converted TiO2 to TiC
    Daniel Ahmoye
    Vladimir D. Krstic
    Journal of Materials Science, 2015, 50 : 2806 - 2812
  • [49] Smooth anodic TiO2 nanotubes:: annealing and structure
    Macak, Jan M.
    Aldabergerova, Saule
    Ghicov, Andrei
    Schmuki, Patrik
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2006, 203 (10): : R67 - R69
  • [50] Study of the Interface Properties of TiO2/SiO2/SiC by Photocapacitance
    Weng, M. N.
    Barker, S.
    Mahapatra, R.
    Furnival, B. J. D.
    Wright, N. G.
    Horsfall, A. B.
    SILICON CARBIDE AND RELATED MATERIALS 2010, 2011, 679-680 : 350 - 353
12345