Nanoscale smoothing of plasmonic films and structures using gas cluster ion beam irradiation

被引：0
|
作者：
Ee Jin Teo
Noriaki Toyoda
Chengyuan Yang
Andrew A. Bettiol
Jing Hua Teng
机构：
[1] Institute of Materials Research and Engineering,Graduate School of Engineering
[2] University of Hyogo,Department of Physics
[3] National University of Singapore,undefined
来源：
Applied Physics A | 2014年 / 117卷
关键词：
Silver Film; Surface Plasmon Polariton Waveguide; Nanometer Precision; Surface Plasmon Propagation; Longe Propagation Length;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We present a novel method of using gas cluster ion beam irradiation (GCIB) to flatten and widen grains in silver films and structures, while simultaneously, reducing the film thickness with nanometer precision. Ultrathin Ag films produced by GCIB have lower absorbance and better adhesion compared to as-deposited films. By applying the technique post-fabrication to plasmonic color filters, waveguides and disks, we show that an enhanced surface plasmon resonance and propagation length can be achieved.
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页码：719 / 723
页数：4
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