Nanoscale smoothing of plasmonic films and structures using gas cluster ion beam irradiation

被引：0
|
作者：
Ee Jin Teo
Noriaki Toyoda
Chengyuan Yang
Andrew A. Bettiol
Jing Hua Teng
机构：
[1] Institute of Materials Research and Engineering,Graduate School of Engineering
[2] University of Hyogo,Department of Physics
[3] National University of Singapore,undefined
来源：
Applied Physics A | 2014年 / 117卷
关键词：
Silver Film; Surface Plasmon Polariton Waveguide; Nanometer Precision; Surface Plasmon Propagation; Longe Propagation Length;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We present a novel method of using gas cluster ion beam irradiation (GCIB) to flatten and widen grains in silver films and structures, while simultaneously, reducing the film thickness with nanometer precision. Ultrathin Ag films produced by GCIB have lower absorbance and better adhesion compared to as-deposited films. By applying the technique post-fabrication to plasmonic color filters, waveguides and disks, we show that an enhanced surface plasmon resonance and propagation length can be achieved.
引用
收藏
页码：719 / 723
页数：4
相关论文
共 50 条
  • [1] Nanoscale smoothing of plasmonic films and structures using gas cluster ion beam irradiation
    Teo, Ee Jin
    Toyoda, Noriaki
    Yang, Chengyuan
    Bettiol, Andrew A.
    Teng, Jing Hua
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2014, 117 (02): : 719 - 723
  • [2] Enhanced plasmonic performance in ultrathin silver structures using Gas Cluster Ion Beam Irradiation
    Teo, Ee Jin
    Toyoda, Noriaki
    Yang, Chengyuan
    Wang, Bing
    Zhang, Nan
    Bettiol, Andrew Anthony
    Teng, Jing Hua
    2014 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2014,
  • [3] Smoothing of ZnO films by gas cluster ion beam
    Chen, H
    Liu, SW
    Wang, XM
    Iliev, MN
    Chen, CL
    Yu, XK
    Liu, JR
    Ma, K
    Chu, WK
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 241 (1-4): : 630 - 635
  • [4] Modification and smoothing of patterned surface by gas cluster ion beam irradiation
    Hirota, T.
    Toyoda, N.
    Yamamoto, A.
    Yamada, I.
    APPLIED SURFACE SCIENCE, 2009, 256 (04) : 1110 - 1113
  • [5] Low damage smoothing of magnetic material films using a gas cluster ion beam
    Kakuta, S.
    Sasaki, S.
    Hirano, T.
    Ueda, K.
    Seki, T.
    Ninomiya, S.
    Hada, M.
    Matsuo, J.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2007, 257 : 677 - 682
  • [6] Low damage smoothing of magnetic materials using oblique irradiation of gas cluster ion beam
    Kakuta, S
    Sasaki, S
    Furusawa, K
    Seki, T
    Aoki, T
    Matsuo, J
    Surface Engineering 2004 - Fundamentals and Applications, 2005, 843 : 183 - 188
  • [7] Substrate smoothing using gas cluster ion beam processing
    Allen, LP
    Fenner, DB
    Difilippo, V
    Santeufemio, C
    Degenkolb, E
    Brooks, W
    Mack, M
    Hautala, J
    JOURNAL OF ELECTRONIC MATERIALS, 2001, 30 (07) : 829 - 833
  • [8] Substrate smoothing using gas cluster ion beam processing
    L. P. Allen
    D. B. Fenner
    V. Difilippo
    C. Santeufemio
    E. Degenkolb
    W. Brooks
    M. Mack
    J. Hautala
    Journal of Electronic Materials, 2001, 30 : 829 - 833
  • [9] Low damage smoothing of magnetic materials using off-nonnal gas cluster ion beam irradiation
    Kakuta, S.
    Sasaki, S.
    Furusawa, K.
    Seki, T.
    Aoki, T.
    Matsuo, J.
    SURFACE & COATINGS TECHNOLOGY, 2007, 201 (19-20): : 8632 - 8636
  • [10] Surface Smoothing and etching by gas cluster ion beam
    Song, JH
    Choi, WK
    APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY, 2003, 680 : 745 - 749
12345