Stable current oscillations accompanying magnetron sputtering of oxide targets

被引：0
|
作者：
A. Kh. Abduev
A. M. Magomedov
机构：
[1] Institute of Physics,
[2] Dagestan Scientific Center,undefined
来源：
Technical Physics Letters | 1998年 / 24卷
关键词：
Oxide; Oxygen; Atomic Oxygen; Magnetron Sputtering; Continuous Generation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Undamped total current oscillations were observed for the first time during dc magnetron sputtering of oxide ceramic targets. It was shown that these oscillations were caused by the continuous generation of atomic oxygen as a result of chemisorption-desorption processes at the surface of the target heated by ion bombardment. Oscillations of an attachment nature (similar to Trichel oscillations) were observed at low pressures (P=4×10−4 Torr).
引用
收藏
页码：192 / 193
页数：1
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