Structure and characteristics of a MEMS wave angular rate sensor with a ring resonator

Dynamics and control of ring resonator oscillations in a micromechanical gyroscope using inertia of elastic waves are discussed. In the gyro considered in this paper, excitation of the resonator oscillations is provided due to an active oscillator with an additional loop for stabilization of elastic oscillations. The required dynamic characteristics of the gyro can be obtained if the measuring channel has feedback to the rate of the resonator-ring radial displacements in the readout zone. A methodology is proposed to obtain a model of enveloping physical oscillations in the form of differential equations, which is a convenient tool for studying the performance of direct-measurement and closed-loop gyroscopes. © 2015, Pleiades Publishing, Ltd.