A MEMS tunable optical ring resonator filter

被引：9

作者：

Mamdouh, T ^{[1
]}

Khalil, D ^{[1
]}

机构：

[1] Ain Shams Univ, Fac Engn, Elect & Commun Engn Dept, Cairo, Egypt

来源：

OPTICAL AND QUANTUM ELECTRONICS | 2005年 / 37卷 / 09期

关键词：

integrated optics; optical MEMS; ring resonators; tunable optical filters;

D O I：

10.1007/s11082-005-0958-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, a new architecture for a ring resonator tunable optical filter is proposed. In this architecture, two rings are connected to each other by a directional coupler and tuning is achieved through the control of the separation between the coupler two parallel guides using a micro-electro-mechanical systems (MEMS) actuator. The optical performance of the filter is tested using the FDTD and an analytical model is developed to predict its performances. A good agreement between the analytical and numerical results is obtained. The MEMS design is also presented and verified using an finite element method (FEM) analysis.

引用

页码：835 / 853

页数：19

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