Misfit dislocations and stress in In1 − xGaxAs/GaAs heterostructures

被引:0
|
作者
I. V. Kurilo
S. K. Guba
机构
[1] Lviv Polytechnic National University,
来源
Inorganic Materials | 2011年 / 47卷
关键词
GaAs; Misfit Dislocation; Thermal Expansion Mismatch; Solid Source Molecular Beam Epitaxy; Critical Film Thickness;
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摘要
We have estimated the elastic properties of In1 − xGaxAs/GaAs heterostructures and the characteristics of misfit dislocations in such heterostructures: misfit dislocation spacing, Burgers vector length in various interfaces, surface density of dangling bonds, film/substrate interface energy, critical film thickness below which pseudomorphic growth is possible without misfit dislocations, elastic strain energy of the film-substrate system, average elastic strain of a thin-film island as a function of its radius, thermal stresses induced by the thermal-expansion and lattice mismatches between the layers in contact, and crack length in the film.
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页码:819 / 823
页数:4
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