Fe/Cr and Cu/Cr film pressure-sensitive elements

被引:0
|
作者
I. M. Pazukha
I. E. Protsenko
机构
[1] Sumy State University,
来源
Technical Physics | 2010年 / 55卷
关键词
Pressure Sensor; Sensitive Element; Gauge Factor; Film System; Lated Pressure Coefficient;
D O I
暂无
中图分类号
学科分类号
摘要
A pressure-sensitive element based on Fe/Cr or Cu/Cr film composition is described. The role of interdiffusion and phase formation is discussed, and the interface stability is studied.
引用
收藏
页码:571 / 575
页数:4
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