Fe/Cr and Cu/Cr film pressure-sensitive elements

被引：0
|
作者：
I. M. Pazukha
I. E. Protsenko
机构：
[1] Sumy State University,
来源：
Technical Physics | 2010年 / 55卷
关键词：
Pressure Sensor; Sensitive Element; Gauge Factor; Film System; Lated Pressure Coefficient;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A pressure-sensitive element based on Fe/Cr or Cu/Cr film composition is described. The role of interdiffusion and phase formation is discussed, and the interface stability is studied.
引用
收藏
页码：571 / 575
页数：4
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