[1] Inter-University Semiconductor Research Center,Department of Electrical and Computer Engineering
[2] Seoul National University,School of Electrical and Computer Engineering
[3] The University of Seoul,Department of Materials Science and Engineering
[4] The University of Seoul,Department of Electrical and Computer Engineering
[5] Inter-University Semiconductor Research Center,Construction Equipment Technology Center
[6] Seoul National University,undefined
[7] Korea Institute of Industrial Technology (KITECH),undefined