Physical Features of the Particle Flow Created by a Low-Power Helicon Plasma Source

被引：0
|
作者：
I. I. Zadiriev
K. V. Vavilin
E. A. Kralkina
A. M. Nikonov
G. V. Shvydky
机构：
[1] Moscow State University,
来源：
Plasma Physics Reports | 2022年 / 48卷
关键词：
radio frequency; inductive; helicon plasma source;
D O I：
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中图分类号：
学科分类号：
摘要：
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收藏
页码：961 / 972
页数：11
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