On the Optical Properties and Structure of In2O3 Films Deposited onto Al2O3 (012) Substrates by dc-Magnetron Sputtering

被引：0
|
作者：
A. A. Tikhii
Yu. M. Nikolaenko
K. A. Svyrydova
I. V. Zhikharev
机构：
[1] Lugansk State Pedagogical University,
[2] Galkin Donetsk Institute for Physics and Engineering,undefined
[3] Donbas National Academy of Civil Engineering and Architecture,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
indium oxide; films; sapphire; ellipsometry; optical transmission; X-ray diffraction analysis; magnetron deposition; annealing; substrate temperature; deposition time; band gap; optical properties;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：562 / 567
页数：5
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