Photoinduced Crystallization of Sb2Se3 and Ge2Sb2Te5 Chalcogenide Films

被引:0
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作者
Y. S. Lebedeva
M. P. Smayev
I. A. Budagovsky
M. E. Fedyanina
I. S. Sinev
T. S. Kunkel
A. V. Romashkin
P. A. Smirnov
A. A. Sherchenkov
S. A. Kozyukhin
P. I. Lazarenko
机构
[1] National Research University of Electronic Technology (MIET),
[2] Lebedev Physical Institute,undefined
[3] Russian Academy of Sciences,undefined
[4] ITMO University,undefined
[5] Moscow Institute of Physics and Technology,undefined
[6] Kurnakov Institute of General and Inorganic Chemistry,undefined
[7] Russian Academy of Sciences,undefined
[8] National Research Tomsk State University,undefined
关键词
chalcogenide films; phase-change materials; laser crystallization; surface; optical properties; spectrophotometry; ellipsometry; atomic-force microscopy; Raman spectroscopy;
D O I
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学科分类号
摘要
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页码:S339 / S348
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