Photoinduced Crystallization of Sb2Se3 and Ge2Sb2Te5 Chalcogenide Films

被引：0
|
作者：
Y. S. Lebedeva
M. P. Smayev
I. A. Budagovsky
M. E. Fedyanina
I. S. Sinev
T. S. Kunkel
A. V. Romashkin
P. A. Smirnov
A. A. Sherchenkov
S. A. Kozyukhin
P. I. Lazarenko
机构：
[1] National Research University of Electronic Technology (MIET),
[2] Lebedev Physical Institute,undefined
[3] Russian Academy of Sciences,undefined
[4] ITMO University,undefined
[5] Moscow Institute of Physics and Technology,undefined
[6] Kurnakov Institute of General and Inorganic Chemistry,undefined
[7] Russian Academy of Sciences,undefined
[8] National Research Tomsk State University,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
chalcogenide films; phase-change materials; laser crystallization; surface; optical properties; spectrophotometry; ellipsometry; atomic-force microscopy; Raman spectroscopy;
D O I：
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中图分类号：
学科分类号：
摘要：
引用
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页码：S339 / S348
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