Linearity measurement in an atomic-force microscope

被引：0
|
作者：
A. V. Rakov
Yu. A. Novikov
P. A. Todua
机构：
[1] Russian Academy of Sciences,Prokhorov General Physics Institute
[2] Surface and Vacuum Properties Research Center,undefined
来源：
Measurement Techniques | 2008年 / 51卷
关键词：
atomic-force microscope; scanning;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A method is presented for measuring the scan linearity in an atomic-force microscope, which uses the first derivative of the signal. The method has been tested on a standard microscope and has shown good results.
引用
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页码：594 / 598
页数：4
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