LINEARITY MEASUREMENT IN AN ATOMIC-FORCE MICROSCOPE

被引：1
|
作者：
Rakov, A. V. [1 ]
Novikov, Yu. A. [1 ]
Todua, P. A.
机构：
[1] Russian Acad Sci, Prokhorov Gen Phys Inst, Moscow 117901, Russia
来源：
MEASUREMENT TECHNIQUES | 2008年 / 51卷 / 06期
关键词：
atomic-force microscope; scanning;
D O I：
10.1007/s11018-008-9084-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A method is presented for measuring the scan linearity in an atomic-force microscope, which uses the first derivative of the signal. The method has been tested on a standard microscope and has shown good results.
引用
收藏
页码：594 / 598
页数：5
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