Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode

被引：1

作者：

Men'shakov, A., I ^{[1
,2
]}

Emlin, D. R. ^{[1
]}

机构：

[1] Russian Acad Sci, Inst Electrophys, Ural Branch, Ekaterinburg 620016, Russia

[2] Ural Fed Univ, Ekaterinburg 620075, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2021年 / 47卷 / 07期

基金：

俄罗斯科学基金会;

关键词：

titanium nitride; anodic evaporation; self-heated hollow cathode; PVD; PLASMA; DEPOSITION;

D O I：

10.1134/S1063785021050254

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We propose a method for obtaining TiN coatings by reactive anodic evaporation of titanium using a high-current (30 A) discharge with a self-heated hollow cathode in an Ar + N-2 gas mixture. The optical spectral analysis shows that the gas-discharge plasma contains a large amount of activated titanium, while the fraction of singly charged metal ions supplied from the plasma to substrate reaches up to 70%. Titanium coatings with 2-mu m thickness and up to 24-GPa hardness were obtained at a nitrogen flow rate of 5 cm(3)/min. The rate of TiN deposition at a distance of 7 cm from the vapor source amounted to similar to 4 mu m/h.

引用

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页码：511 / 514

页数：4

共 43 条

[1] Obtaining TiN Coatings by Reactive Anodic Evaporation of Titanium in a Gas Discharge with a Self-Heated Hollow Cathode
A. I. Men’shakov
D. R. Emlin
Technical Physics Letters, 2021, 47 : 511 - 514
[2] Discharge System with a Self-Heated Hollow Cathode and an Evaporating Anode in a Cusp Magnetic Field for Oxide Coatings Deposition
N. V. Gavrilov
A. S. Kamenetskikh
D. R. Emlin
P. V. Tretnikov
A. V. Chukin
Technical Physics, 2019, 64 : 807 - 813
[3] Experimental study of the transition to high-current regime of discharge with a hollow self-heated titanium cathode in nitrogen
N. V. Gavrilov
A. I. Men’shakov
Technical Physics Letters, 2012, 38 : 1031 - 1033
[4] Discharge with a self-heated hollow cathode and a vaporizable anode in an inhomogeneous magnetic field
Gavrilov, N. V.
Kamenetskikh, A. S.
Krivoshapko, S. V.
Tretnikov, P. V.
6TH INTERNATIONAL CONGRESS ENERGY FLUXES AND RADIATION EFFECTS, 2018, 1115
[5] Experimental study of the transition to high-current regime of discharge with a hollow self-heated titanium cathode in nitrogen
Gavrilov, N. V.
Men'shakov, A. I.
TECHNICAL PHYSICS LETTERS, 2012, 38 (11) : 1031 - 1033
[6] Discharge System with a Self-Heated Hollow Cathode and an Evaporating Anode in a Cusp Magnetic Field for Oxide Coatings Deposition
Gavrilov, N. V.
Kamenetskikh, A. S.
Emlin, D. R.
Tretnikov, P. V.
Chukin, A. V.
TECHNICAL PHYSICS, 2019, 64 (06) : 807 - 813
[7] Tribomechanical Properties of TiSiCN Coatings Obtained by Anodic Evaporation of Titanium and Decomposition of Hexamethyldisilazane in a Discharge in a System with a Self-Heating Hollow Cathode
A. I. Menshakov
Yu. A. Bryuhanova
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2024, 18 (5) : 1265 - 1270
[8] Self-heated hollow cathode discharge system for charged particle sources and plasma generators
Gushenets, V. I.
Bugaev, A. S.
Oks, E. M.
Schanin, P. M.
Goncharov, A. A.
REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (02):
[9] A self-heated hollow cathode made of compacted TiN powder: the preparation method and test results
N. V. Gavrilov
A. S. Kamenetskikh
S. N. Paranin
A. V. Spirin
A. V. Chukin
Instruments and Experimental Techniques, 2017, 60 : 742 - 747
[10] A self-heated hollow cathode made of compacted TiN powder: the preparation method and test results
Gavrilov, N. V.
Kamenetskikh, A. S.
Paranin, S. N.
Spirin, A. V.
Chukin, A. V.
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2017, 60 (05) : 742 - 747

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