I-V characteristics of Schottky/metal-insulator-semiconductor diodes with tunnel thin barriers

被引:12
|
作者
Sugimura, T [1 ]
Tsuzuku, T [1 ]
Kasai, Y [1 ]
Iiyama, K [1 ]
Takamiya, S [1 ]
机构
[1] Kanazawa Univ, Grad Sch Nat Sci & Technol, Kanazawa, Ishikawa 9208667, Japan
关键词
Schottky diode; MIS diode; MOS diode; ultra-thin insulating layer; tunnel current; I-V curve;
D O I
10.1143/JJAP.39.4521
中图分类号
O59 [应用物理学];
学科分类号
摘要
Current-voltage (I-V) characteristics and their temperature dependence, of Schottky and metal-insulator-semiconductor diodes with tunnel thin insulating layers, are theoretically and experimentally studied. The effective barrier height of a Schottky diode becomes low and strongly dependent upon the applied voltage, when the impurity density of the semiconductor increases such that the tunnel current dominates the total current. The I-V curves and their temperature dependence, of the tunnel thin MIS diodes strongly reflect the characteristics of the Schottky diodes, although the insulating layers suppress the currents, depending upon their I-layers thickness.
引用
收藏
页码:4521 / 4522
页数:2
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