Sub-wavelength imaging by depolarization in a reflection near-field optical microscope using an uncoated fiber probe

被引:14
|
作者
Madsen, S
Bozhevolnyi, SI
Hvam, JM
机构
[1] Tech Univ Denmark, Mikroelekt Ctr, DK-2800 Lyngby, Denmark
[2] DME, Danish Micro Engn AS, DK-2730 Herlev, Denmark
[3] Univ Aalborg, Inst Phys, DK-9220 Aalborg E, Denmark
关键词
near-field optical microscopy; shear-force microscopy; subwavelength resolution;
D O I
10.1016/S0030-4018(97)00501-4
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We present a reflection scanning near-field optical microscope utilizing counter-directional light propagation in an uncoated fiber probe, cross-polarized detection and shear-force feedback. Topographical and near-field optical imaging with a scanning speed of up to 10 mu m/s and a lateral resolution better than 40 nm are demonstrated with a latex projection test sample. Determination of the optical resolution as well as correlation between topographical and near-field optical images are discussed. (C) 1998 Elsevier Science B.V.
引用
收藏
页码:277 / 284
页数:8
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