Near-field scanning optical microscope probe analysis

被引:1
|
作者
Klapetek, Petr [1 ]
Bursik, Jiri [2 ]
Valtr, Miroslav [1 ]
Martinek, Jan [3 ]
机构
[1] Czech Mctrol Inst, Brno 63800, Czech Republic
[2] Inst Phys Mat, Brno 61662, Czech Republic
[3] Brno Univ Technol, Brno 60200, Czech Republic
关键词
NSOM; artifacts;
D O I
10.1016/j.ultramic.2007.10.014
中图分类号
TH742 [显微镜];
学科分类号
摘要
In this article results of a comparison of two NSOM probe characterization methods are presented. Scanning electron microscopy analysis combined with electromagnetic field modeling using the finite difference in time domain method are compared with measured far-field radiation diagrams of NSOM probes. It is shown that measurement of far-field radiation diagrams can be an efficient tool for daily checking of the NSOM probes quality. Moreover, it is shown that the inner probe geometry has large influence on the directional radiation of an NSOM probe and the far-field radiation diagram can be used as a simple method to distinguish between different probe geometries. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码:671 / 676
页数:6
相关论文
共 50 条