THREE-DOF CMOS-MEMS PROBES WITH EMBEDDED PIEZORESISTIVE SENSORS

被引：0
|
作者：
Liu, J. [1 ]
Draghi, L. [1 ]
Bain, J. A. [1 ]
Schlesinger, T. E. [1 ]
Fedder, G. K. [1 ]
机构：
[1] Carnegie Mellon Univ, Pittsburgh, PA 15213 USA
来源：
MEMS 2010: 23RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2010年
关键词：
FORCE; MICROGRIPPER;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on a new 3-DOF CMOS-MEMS electrothermal probe, featuring embedded piezoresistive sensors. These probes have the potential to be used independently for general 3-DOF nanoscale manipulation/manufacturing/scanning without external actuation and sensing. In this probe design, 3-DOF piezoresistive sensors are used to track probe actuation and applied force in all three directions, and thermal management such as dummy heater beams and metal-slotted thermal isolation structures are used to improve drive sensitivity.
引用
收藏
页码：284 / 287
页数：4
相关论文
共 50 条
  • [41] MEMS Inertia Sensors in Semi-Standard Processes - Transiting from University's Laboratory to a CMOS-MEMS Foundry
    Chow, Chee Lap
    Li, King Ho Holden
    SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP 2019), 2019,
  • [42] CMOS-MEMS micro sensors using mesoporous carbon immobilized by the dielectrophoresis process for gas detection
    Liao, Kuan-Hsun
    Lu, Chih-Cheng
    Liu, Chuch-Yang
    2007 INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE, PROCEEDINGS OF TECHNICAL PAPERS, 2007, : 142 - +
  • [43] Fabrication, process optimization and electrical characterization of thermopile based CMOS-MEMS flow sensors in 180 nm CMOS technology
    Ammar Yasser
    Ashish Kr. Chauhan
    Nishant Shukla
    S. P. S. Arora
    Monika Gupta
    Satyapal Singh
    ISSS Journal of Micro and Smart Systems, 2024, 13 (2) : 81 - 88
  • [44] A V-Band Three-State Phase Shifter in CMOS-MEMS Technology
    Chang, Chia-Chan
    Chen, Ying-Chiuan
    Hsieh, Sheng-Chi
    IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2013, 23 (05) : 264 - 266
  • [45] AN EFFECTIVE TEMPERATURE COMPENSATION ALGORITHM FOR CMOS-MEMS THERMAL-PIEZORESISTIVE OSCILLATORS WITH SUB PPM/°C THERMAL STABILITY
    Zope, Anurag A.
    Ranjith, H. G.
    Chang, Jung-Hao
    Chen, Cheng-Chi
    Yao, Da-Jeng
    Li, Sheng-Shian
    30TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2017), 2017, : 885 - 888
  • [46] A 2DOF SOI-MEMS Nanopositioner With Tilted Flexure Bulk Piezoresistive Displacement Sensors
    Maroufi, Mohammad
    Moheimani, S. O. Reza
    IEEE SENSORS JOURNAL, 2016, 16 (07) : 1908 - 1917
  • [47] Piezoresistive CMOS-MEMS pressure sensor with ring oscillator readout including Δ-Σ analog-to-digital converter on-chip
    Oysted, K
    Wisland, DT
    CICC: PROCEEDINGS OF THE IEEE 2005 CUSTOM INTEGRATED CIRCUITS CONFERENCE, 2005, : 511 - 514
  • [48] A 125-KHZ CMOS-MEMS RESOSWITCH EMBEDDED ZERO QUIESCENT POWER OOK/FSK RECEIVER
    Tsai, Chun-Pu
    Liao, Yen-Yu
    Li, Wei-Chang
    2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020), 2020, : 106 - 109
  • [49] Design and Optimization of a CMOS-MEMS Integrated Current Mirror Sensing based MOSFET Embedded Pressure Sensor
    Rathore, Pradeep Kumar
    Panwar, Brishbhan Singh
    2013 IEEE INTERNATIONAL CONFERENCE ON CONTROL APPLICATIONS (CCA), 2013, : 443 - 448
  • [50] CMOS-MEMS Capacitive Sensors for Intra-cranical Pressure Monitoring: Sensor Fabrication & System Design
    George, Arup K.
    Chan, Wai Pan
    Narducci, Margarita Sofia
    Kong, Zhi Hui
    Je, Minkyu
    2012 INTERNATIONAL SOC DESIGN CONFERENCE (ISOCC), 2012, : 375 - 378
12345